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Sydney Nano Foundry

Enabling fabrication at micro and nano scale
  • #access Access our facilities
  • https://forms.office.com/pages/responsepage.aspx?id=fuOzgnGBXUixCzja5-0UqMGl6VtTjhNHsdKkE35ADLRUNkNUMzM5RUVQRDA4OUpFVUlWVkM5MTM4NS4u&route=shorturl Project enquiries

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Who we are

The Sydney Nano Foundry (formerly Research and Prototype Foundry) is a Core Research Facility, based鈥痑t the Sydney Nanoscience Hub, and is a member of the network. It听offers instruments for the fabrication of devices and structures with鈥痜eatures on the micro and nano scale. Our specialised processes allow researchers and industry to鈥痙evelop and prototype new devices.

The Sydney Nano Foundry (formerly Research and Prototype Foundry), enables fabrication of a wide range of research material and devices, with applications in areas including optical chips, electronics, microfluidics and new quantum science and technology.

We provide access to state-of-the-art instruments and processes for lithography, etching, deposition, and metrology, backed up by a team of expert process engineers. Our capabilities and services support early development, enabling researchers and industry alike to make devices and prototype new ideas.鈥

Send us your project goals and requirements, and our staff will put together a tailored registration and training program to ensure that you can make the most of our facilities.

  1. Consultation. Once we receive your , our staff will work with you to put together a viable project design, taking into account factors such as experimental scope, instrument requirements, and budget.
  2. Activation. We will assist you in registering your project, and will guide you through any necessary formalities prior to project commencement.
  3. Induction. We will organise a bespoke instrument training program specific to your needs, giving you autonomous access to our facilities to complete your project.

University of Sydney staff and students receive special subsidised rates. Please听听to view service and access rates.

Rate categories:

  • External academic:听Under ANFF Access Policy, all Australian universities are charged at the same rates as internal University of Sydney users.
  • PFRO: AustralianPublicly funded research organisations or not-for-profits.
  • Commercial:听Industry users.

Access rates

Rate category External academic PFRO Commercial
Group 1 equipment $9/hr $50/hr $65/hr
Group 2 equipment $27/hr $150/hr $200/hr
Group 3 equipment $36/hr $200/hr $265/hr
Training $120/hr $165/hr $220/hr
Staff assistance $120/hr $165/hr $220/hr

Group 1 equipment

  • AI 1400C muffle furnace
  • BotFactory PCB Printer
  • Bruker Dektak XT
  • Bruker Nanoindenter Ti Premier
  • Die Bonding 鈥 TPT HB75
  • Die Bonder Fine Tech Lambda
  • Dicing Saw ADT
  • Dry Film Laminator Fortex FL鈥0305鈥01
  • Emitech K550
  • Fibre Draw Tower
  • Fibre Hydrogenation System
  • Glow O鈧 Plasma Asher
  • JA Woollam Ellipsometer
  • Karl Suss PM5 Probe Station
  • MILA 5000 Lamp Annealer
  • NanoProbe with Keithley Parametric Analyser
  • Nikon Instruments LV鈥100ND
  • Olympus DSX 510 Optical Microscopes
  • PDMS Process Tools
  • Southbay RIE3000
  • Wire Bonding 鈥 TPT HB100

Group 2 equipment

  • 3D Nano Printer Nanoscribe
  • AJA ATC鈥1800 Evaporator
  • AJA ATC鈥2000鈥慤HV Sputterer
  • Atomic Force Microscope Bruker Icon
  • E400 CMP
  • EVG 501 Wafer Bonding
  • EVG 610 Mask Aligner
  • Film Stress Measurement KSA UltraScan
  • HF Vapour Etch SPTS uEtch
  • Heidelberg DWL 66+
  • Heidelberg MLA100
  • Leica DCM8 3D Microscope
  • Mercury Probe Mapping CV Map92 A/B
  • Oxford ICP RIE
  • PECVD Plasma Pro 100
  • PicoTrack PCT鈥150 Coater鈥慏eveloper
  • Picosun ALD R200
  • Plassys MEB550S4鈥慖 UHV
  • Plasmatherm RIE
  • Reynolds Tech Wet Bench
  • SemiProbe with Keithley Parametric Analyser

Group 3 equipment

  • Elionix EBL ELS鈥慒125
  • Metrology 鈥 Zeiss
  • NanoFab Helium Ion Beam
  • Zeiss Crossbeam 550XL FIB鈥慡EM

Photomasks

Prices exclude delivery and handling. Standard lead time is 10 business days.

Size External academic PFRO / Commercial
4鈥 脳 0.06鈥 Soda lime $315 $476
5鈥 脳 0.09鈥 Soda lime $381 $575
6鈥 脳 0.09鈥 Soda lime $480 $716
7鈥 脳 0.12鈥 Soda lime $772 $1,009
5鈥 脳 0.09鈥 Quartz $581 $775

Notes:

Precious metals and some consumables are charged at cost. Masks use low reflective chrome by default.听Other mask sizes and chrome types may be available upon request;听contact us for pricing.听Critical dimensions down to 2um are听available under standard resolution. High-resolution听is available upon request and can听produce CD听down to 1um.听All mask designs must meet Foundry听Guidelines to qualify for standard pricing;听additional听design charges based on staff labour rates may be incurred if this is not the case.

  • Quoted prices do not include GST, delivery and handling costs
  • All prices are based on standard lead time of 10 working days; additional labour charges apply for faster turnaround
  • Prices and tools are subject to change.

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Existing or new user?

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Log in to submit a project or book equipment

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Resources

Facilities

Cleanroom

Approximately 700sqm of ISO 5 cleanroom space which houses Sydney鈥檚 deposition, etching, lithography, metrology, and wet processing facilities.

At the Sydney Nano Foundry, micro and nano-scale devices are made in our cleanroom. A cleanroom is a laboratory where the environment is strictly controlled to eliminate contaminants such as humidity and dust, which can affect sensitive products and processes.

Level 2 Sydney Nanoscience Hub (A31)

Packaging & soft lithography facility

Approximately 75sqm of semi-clean space for PDMS processing and packaging

Lab 3021, Sydney Nanoscience Hub (A31)

Advanced fibre Bragg grating (FBG)听facility

FBG writing, testing, and annealing, plus fibre laser testing.

Physics Building (A28)

Fibre fabrication听facility

Fibre draw tower and CNC mill.
Physics Building (A28)

Contact us

Locations

Our main facility is located in the Research wing of the Sydney Nanoscience Hub (A31), Physics Road, The University of Sydney NSW 2006.

We also operate a site in the adjacent Physics Building (A28).

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